MEASURING IN-SITU UV INTENSITY IN UV CURE TOOL

PURPOSE: An ultraviolet ray measuring device is provided to produce uniform exposure by rotating an ultraviolet ray lamp assembly or a substrate in the ultra-violet ray hardening. CONSTITUTION: An ultraviolet ray lamp assembly(401) is installed on a processing chamber(413). The ultraviolet ray lamp...

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Hauptverfasser:	LEE JAMES, KENANE BOAZ, CHEN XIAOLAN, SMARGIASSI EUGENE
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: An ultraviolet ray measuring device is provided to produce uniform exposure by rotating an ultraviolet ray lamp assembly or a substrate in the ultra-violet ray hardening. CONSTITUTION: An ultraviolet ray lamp assembly(401) is installed on a processing chamber(413). The ultraviolet ray lamp assembly comprises a transformer and a magnetron. The transformer pumps microwave energy within an ultraviolet ray bulb(405) and a reflector(407). An ultraviolet ray detector assembly(409) is installed under the ultraviolet ray lamp assembly. A chamber window(411) passes through UV radiation from the ultraviolet ray bulb to a substrate(417) under the processing chamber. The substrate is settled on a substrate support portion(415).