APPARATUS FOR MANUFACTURING POLY SILICON WITH A FUNCTION OF IMPROVED POWDER COLLECTION IN CHAMBER OF THE BELL-JAR TYPE REACTOR

PURPOSE: A polysilicon manufacturing apparatus with the enhanced function for collecting powder in a bell type reactor is provided to effectively collect powder generated from a polysilicon manufacturing process by using monosilane as raw silane gas. CONSTITUTION: A polysilicon manufacturing apparat...

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Bibliographische Detailangaben
Hauptverfasser:	YOU, HO JUNG, KIM, SEUNG HYUN, KANG, SEUNG OH, PARK, KUN, PARK, GYU DONG, LEE, CHANG RAE, KIM, BOK SAENG, PARK, SUNG EUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF CRYSTAL GROWTH DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE: A polysilicon manufacturing apparatus with the enhanced function for collecting powder in a bell type reactor is provided to effectively collect powder generated from a polysilicon manufacturing process by using monosilane as raw silane gas. CONSTITUTION: A polysilicon manufacturing apparatus includes a bell type reactor, an electrode part, a silicon core rod part, and a pre-heating part. A chamber is arranged in the reactor, and a gas inlet(112) and a gas outlet(114) are formed at the bottom of the chamber. The electrode part penetrates through the lower part of the reactor to the bottom of the chamber. The electrode part includes a first electrode(122) and a second electrode(124). The silicon core rod part pyrolyzes raw gas such that silicon is precipitated on the surface of the silicon core rod part. The pre-heating part pre-heats the silicon core rod part to lower specific resistance until the silicon core rod part is electrical resistance heated. The power collecting part collects power from the chamber.