LINEAR EVAPORATION SOURCE

PURPOSE: A linear evaporating source is provided to uniformly control a temperature with respect to a whole length by controlling power being applied to the heater for reducing a temperature difference sensed by a temperature sensor, thereby evaporating a uniform thin film on a large size of a subst...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, SEONG MOON, CHI, DAE JOON, LEE, TAEK GI, KANG, IL SUK, JEONG, KWANG HO, JUNG, EUN SANG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: A linear evaporating source is provided to uniformly control a temperature with respect to a whole length by controlling power being applied to the heater for reducing a temperature difference sensed by a temperature sensor, thereby evaporating a uniform thin film on a large size of a substrate. CONSTITUTION: A linear evaporating source(200) comprises an outlet(210). The outlet is composed a plurality of through holes. A whole silhouette of the outlet is a slot silhouette in which a central part of the linear evaporation source is narrow and becomes widen to both end parts. A whole length of the liner evaporation source is coincided with a length of one side of a substrate desired to evaporate. The outlet is perpendicularly formed in the central part and outwardly tilted in both end parts of linear evaporating source. The both end parts of the linear evaporating source make uniform a thickness of a thin film being evaporated.