METHOD FOR PROCESSING CYLINDERICAL SINGLE CRYSTAL SILICON INGOT BLOCK INTO SQUARE COLUMNAR BLOCK AND COMPLEX PROCESSING DEVICE FOR CHAMFERING USED THEREIN

PURPOSE: A method for forming a cylindrical single crystal silicone ingot block into a square column-shaped block and a complex chamfering machine used for the same are provided to perform 4-corner cylinder grinding and lateral grinding at the same time. CONSTITUTION: A complex chamfering machine(1)...

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Bibliographische Detailangaben
Hauptverfasser:	KOBAYASHI KAZUO, SAITOU HIROTUGU, IDE SATORU, YOSHIDA YUTAKA
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A method for forming a cylindrical single crystal silicone ingot block into a square column-shaped block and a complex chamfering machine used for the same are provided to perform 4-corner cylinder grinding and lateral grinding at the same time. CONSTITUTION: A complex chamfering machine(1) comprises a pair of ingot clamp mechanisms, and an ingot receiving stage(80). The ingot receiving stage is installed in a line connecting a slicing stage(90) and a grinding and chamfering stage. An ingot loading stage(8R) and an ingot unloading stage(8L) are formed on the front sides of each clamp mechanism in a standby position.