EXHAUST SYSTEM FOR SINGLE CRYSTAL GROWER AND SINGLE CRYSTAL GROWER INCLUDING THE SAME

PURPOSE: A piping system for a single crystal growth apparatus and a single crystal growth apparatus including the same are provided to monitor contamination balance by measuring temperatures in each piping. CONSTITUTION: Piping includes a port where fluid flows. Temperature sensors(112, 122) are re...

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Bibliographische Detailangaben
1. Verfasser:	HA, SE GEUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY CRYSTAL GROWTH ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE REFINING BY ZONE-MELTING OF MATERIAL SEMICONDUCTOR DEVICES SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE SINGLE-CRYSTAL-GROWTH UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL
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Beschreibung
Zusammenfassung:	PURPOSE: A piping system for a single crystal growth apparatus and a single crystal growth apparatus including the same are provided to monitor contamination balance by measuring temperatures in each piping. CONSTITUTION: Piping includes a port where fluid flows. Temperature sensors(112, 122) are respectively installed in each port. A controller receives and controls the temperature information of each port from each temperature sensor. The piping includes a first top port, a second top port, and a lower port which are installed to be adjacent to the chamber. The temperature sensor comprises a first top port temperature detection sensor, a second top port temperature detection sensor, and a lower port temperature detection sensor(112c) formed in the lower port.