AMINOSILANES AND METHODS FOR MAKING SAME

AMINOSILANES AND METHODS FOR MAKING SAME

PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1...

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Hauptverfasser: LEHMANN JOHN FRANCIS, WITHERS HOWARD PAUL JR
Format: Patent
Sprache:eng ; kor
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ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM
CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
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creator LEHMANN JOHN FRANCIS
WITHERS HOWARD PAUL JR
description PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1R^2. A method for preparing the halo amino silane comprises a step of reacting halo silane and amine under the presence of anhydrous solvent. A method for amino silane compounds comprises: a step of reacting halo silane and amine to prepare a slurry; and a step of introducing a reducing agent to the slurry and reacting partial or entire reducing agent with halo amino silane compounds.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_KR20120037902A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>KR20120037902A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_KR20120037902A3</originalsourceid><addsrcrecordid>eNrjZNBw9PX08w_29HH0cw1WcPRzUfB1DfHwdwlWcPMPUvB19Pb0c1cIdvR15WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BRgaGRgYGxuaWBkaOxsSpAgCATiSt</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>AMINOSILANES AND METHODS FOR MAKING SAME</title><source>esp@cenet</source><creator>LEHMANN JOHN FRANCIS ; WITHERS HOWARD PAUL JR</creator><creatorcontrib>LEHMANN JOHN FRANCIS ; WITHERS HOWARD PAUL JR</creatorcontrib><description>PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1R^2. A method for preparing the halo amino silane comprises a step of reacting halo silane and amine under the presence of anhydrous solvent. A method for amino silane compounds comprises: a step of reacting halo silane and amine to prepare a slurry; and a step of introducing a reducing agent to the slurry and reacting partial or entire reducing agent with halo amino silane compounds.</description><language>eng ; kor</language><subject>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM ; CHEMISTRY ; METALLURGY ; ORGANIC CHEMISTRY</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120420&amp;DB=EPODOC&amp;CC=KR&amp;NR=20120037902A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120420&amp;DB=EPODOC&amp;CC=KR&amp;NR=20120037902A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>LEHMANN JOHN FRANCIS</creatorcontrib><creatorcontrib>WITHERS HOWARD PAUL JR</creatorcontrib><title>AMINOSILANES AND METHODS FOR MAKING SAME</title><description>PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1R^2. A method for preparing the halo amino silane comprises a step of reacting halo silane and amine under the presence of anhydrous solvent. A method for amino silane compounds comprises: a step of reacting halo silane and amine to prepare a slurry; and a step of introducing a reducing agent to the slurry and reacting partial or entire reducing agent with halo amino silane compounds.</description><subject>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM</subject><subject>CHEMISTRY</subject><subject>METALLURGY</subject><subject>ORGANIC CHEMISTRY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNBw9PX08w_29HH0cw1WcPRzUfB1DfHwdwlWcPMPUvB19Pb0c1cIdvR15WFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8d5BRgaGRgYGxuaWBkaOxsSpAgCATiSt</recordid><startdate>20120420</startdate><enddate>20120420</enddate><creator>LEHMANN JOHN FRANCIS</creator><creator>WITHERS HOWARD PAUL JR</creator><scope>EVB</scope></search><sort><creationdate>20120420</creationdate><title>AMINOSILANES AND METHODS FOR MAKING SAME</title><author>LEHMANN JOHN FRANCIS ; WITHERS HOWARD PAUL JR</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_KR20120037902A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; kor</language><creationdate>2012</creationdate><topic>ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM</topic><topic>CHEMISTRY</topic><topic>METALLURGY</topic><topic>ORGANIC CHEMISTRY</topic><toplevel>online_resources</toplevel><creatorcontrib>LEHMANN JOHN FRANCIS</creatorcontrib><creatorcontrib>WITHERS HOWARD PAUL JR</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>LEHMANN JOHN FRANCIS</au><au>WITHERS HOWARD PAUL JR</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>AMINOSILANES AND METHODS FOR MAKING SAME</title><date>2012-04-20</date><risdate>2012</risdate><abstract>PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1R^2. A method for preparing the halo amino silane comprises a step of reacting halo silane and amine under the presence of anhydrous solvent. A method for amino silane compounds comprises: a step of reacting halo silane and amine to prepare a slurry; and a step of introducing a reducing agent to the slurry and reacting partial or entire reducing agent with halo amino silane compounds.</abstract><oa>free_for_read</oa></addata></record>
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subjects ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM
CHEMISTRY
METALLURGY
ORGANIC CHEMISTRY
title AMINOSILANES AND METHODS FOR MAKING SAME
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-25T02%3A56%3A25IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=LEHMANN%20JOHN%20FRANCIS&rft.date=2012-04-20&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EKR20120037902A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true