AMINOSILANES AND METHODS FOR MAKING SAME

PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1...

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Bibliographische Detailangaben
Hauptverfasser:	LEHMANN JOHN FRANCIS, WITHERS HOWARD PAUL JR
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM CHEMISTRY METALLURGY ORGANIC CHEMISTRY
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Beschreibung
Zusammenfassung:	PURPOSE: A method for preparing amino silane is provided to be used as a precursor for deposition of a silicon-containing film. CONSTITUTION: A halo amino silane compound with chemical formula, X_4-nH_n-1SiN(CH(CH_3)_2)_2 is used as an intermediate for preparing an amino silane compound of H_3SiNR^1R^2. A method for preparing the halo amino silane comprises a step of reacting halo silane and amine under the presence of anhydrous solvent. A method for amino silane compounds comprises: a step of reacting halo silane and amine to prepare a slurry; and a step of introducing a reducing agent to the slurry and reacting partial or entire reducing agent with halo amino silane compounds.