APPARATUS AND METHOD FOR PRECISION LOADING OF LIGHT EMITTING DIODE WAFER

PURPOSE: An apparatus and method for precisely loading an LED wafer are provided to reduce process time by loading an LED wafer on a carrier. CONSTITUTION: A transfer robot(40) transfers an LED wafer from a cassette(10) to an aligning unit(93). A picker absorbs and releases an LED wafer which is tra...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: CHOI, SUNG KYU, RYU, IN HWAN, LEE, HAK PYO, YANG, IL CHAN, LEE, BYEONG SEUNG
Format: Patent
Sprache:eng ; kor
Schlagworte:
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