APPARATUS AND METHOD FOR PRECISION LOADING OF LIGHT EMITTING DIODE WAFER
PURPOSE: An apparatus and method for precisely loading an LED wafer are provided to reduce process time by loading an LED wafer on a carrier. CONSTITUTION: A transfer robot(40) transfers an LED wafer from a cassette(10) to an aligning unit(93). A picker absorbs and releases an LED wafer which is tra...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: An apparatus and method for precisely loading an LED wafer are provided to reduce process time by loading an LED wafer on a carrier. CONSTITUTION: A transfer robot(40) transfers an LED wafer from a cassette(10) to an aligning unit(93). A picker absorbs and releases an LED wafer which is transferred from the alignment unit. An imaging unit(80) fixes the picker and obtains location information of the pocket. An LED wafer mounting robot(95) transfers the picker and the imaging unit from the aligning unit to a carrier(30). |
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