APPARATUS FOR FABRICATING ORGANIC ELECTRO LUMINESCENCE DISPLAY DEVICE

PURPOSE: An apparatus for manufacturing an organic electroluminescent display device is provided to steadily deposit an evaporated organic matter by preventing condensation at a first and second slit of a nozzle. CONSTITUTION: A plurality of organic matter containers is arranged in an inner lower pa...

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Bibliographische Detailangaben
1. Verfasser:	PARK, SE PYO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: An apparatus for manufacturing an organic electroluminescent display device is provided to steadily deposit an evaporated organic matter by preventing condensation at a first and second slit of a nozzle. CONSTITUTION: A plurality of organic matter containers is arranged in an inner lower part of a vacuum chamber and includes an organic matter which is deposited on a substrate. A first heater unit heats the organic matter with a structure of surrounding an edge of the organic matter container. A nozzle(131) includes a first slit and second slit(132b) in which the evaporated organic matter is carried out from the organic matter container. A plurality of second heater units(201) is included around the first slit and the second slit of the nozzle. The second heater unit keeps temperature around the first slit and the second slit to be higher than the temperature in the organic matter container.