APPARATUS FOR FABRICATING ORGANIC ELECTRO LUMINESCENCE DISPLAY DEVICE

PURPOSE: An apparatus for fabricating an organic electro luminescence display device is provided to uniformly deposit an organic on a substrate by including a distribution unit which evenly decentralizes the organic matter evaporated in a nozzle into a front of the substrate. CONSTITUTION: A plurali...

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Bibliographische Detailangaben
1. Verfasser:	PARK, SE PYO
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PURPOSE: An apparatus for fabricating an organic electro luminescence display device is provided to uniformly deposit an organic on a substrate by including a distribution unit which evenly decentralizes the organic matter evaporated in a nozzle into a front of the substrate. CONSTITUTION: A plurality of organic matter containers is arranged in an inner lower part of a vacuum chamber and contains an organic matter which is deposited on a substrate. A nozzle(131) offers a route for the organic matter which is evaporated from the organic matter container. A holders(135) for the organic matter container supports the organic matter container and fixes a plurality of organic matter containers on the nozzle. A distribution unit(133) is arranged between the organic matter container and the nozzle and decentralizes the organic matter evaporating from the organic matter container. A plurality of holes, which is evenly distributed leaving at a regular interval, is formed on a front side of the distribution unit.