APPARATUS FOR SEPARATING SUBSTRATE AND METHOD FOR SEPARATING THE SUBSTRATE WITH THE SAME

PURPOSE: A substrate separating device and a method thereof are provided to fix one edge of an upper substrate of a multilayered substrate by a fixing unit, thereby separating the multilayered substrate. CONSTITUTION: A supporting unit(110) supports a multilayered substrate. The supporting unit incl...

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Bibliographische Detailangaben
1. Verfasser:	JUNG, JOUNG SUL
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS PERFORMING OPERATIONS PRINTED CIRCUITS TRANSPORTING
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Beschreibung
Zusammenfassung:	PURPOSE: A substrate separating device and a method thereof are provided to fix one edge of an upper substrate of a multilayered substrate by a fixing unit, thereby separating the multilayered substrate. CONSTITUTION: A supporting unit(110) supports a multilayered substrate. The supporting unit includes a supporting plate(112) and a heater(114). The supporting plate has a supporting surface with a through hole. A bonding layer is inserted into the multilayered substrate so that the multilayered substrate includes an upper substrate and a lower substrate. A fixing unit(120) is fixed to the multilayered substrate. A driving unit(130) includes a first driving machine(132) and a second driving machine(134). A vacuum pressure providing unit(140) provides vacuum pressure to the supporting unit. The vacuum pressure providing unit comprises a vacuum line(142) and a vacuum pump(144).