ELECTROSTATICALLY ACTUATED MICRO-MECHANICAL SWITCHING DEVICE

PURPOSE: A micromechanical switching device which is operated in an electrostatic way is provided to include low loss and high insulating properties within a wide frequency range, thereby improving reliability of an apparatus. CONSTITUTION: An operation part includes a fixed driving electrode(2) and...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	GESSNER THOMAS, LEIDICH STEFAN, NOWACK MARKUS, IKEDA KOICHI, KURTH STEFFEN, AKIBA AKIRA, FROMEL JORG, KAUFMANN CHRISTIAN, BERTZ ANDREAS
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SWITCHES ELECTRICITY EMERGENCY PROTECTIVE DEVICES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY PERFORMING OPERATIONS RELAYS SELECTORS TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: A micromechanical switching device which is operated in an electrostatic way is provided to include low loss and high insulating properties within a wide frequency range, thereby improving reliability of an apparatus. CONSTITUTION: An operation part includes a fixed driving electrode(2) and movable electrode(3). A movable push rod(4) is mechanically connected to the movable electrode. A movable contact element is mechanically connected to one side of the push rod. One or more restoration springs(5) are mechanically connected to the push rod. A signal line(7) and grounding line(13) include two parts(7a,7b) blocked by a gap(10).