CRYSTALLINE SILICON SOLAR CELL USING ALUMINUM SUBSTRATE AND MANUFACTURING METHOD THEREOF
PURPOSE: A crystalline silicon solar cell using an aluminum substrate and a manufacturing method thereof are provided to control the grain size of a polycrystalline silicon layer by controlling the number of nuclei through the control of the thickness, size, and interval of an insulation layer. CONS...
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Zusammenfassung: | PURPOSE: A crystalline silicon solar cell using an aluminum substrate and a manufacturing method thereof are provided to control the grain size of a polycrystalline silicon layer by controlling the number of nuclei through the control of the thickness, size, and interval of an insulation layer. CONSTITUTION: An insulation layer(2a) is formed on an aluminum substrate(1). The insulation layer is selectively removed. A p type amorphous silicon layer(3a) is formed on the removed insulation layer(2b). A polycrystalline silicon layer(3b) is formed by thermally processing the amorphous silicon layer. An i-layer amorphous silicon layer(4), an n-layer amorphous silicon layer(5), and a transparent electrode(6) are formed on the polycrystalline silicon layer. |
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