CAPACITOR AND PROCESS FOR MANUFACTURING CAPACITOR

CAPACITOR AND PROCESS FOR MANUFACTURING CAPACITOR

Disclosed is a capacitor characterized by comprising: a lower electrode layer comprising an electrically conductive metal or a compound of the metal; a first dielectric film formed on the lower electrode layer and comprising ZrO2; a second dielectric film formed on the first dielectric film and comp...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: AKASAKA YASUSHI, ARIKADO TSUNETOSHI, KAITSUKA TAKANOBU, ALBERT CHIN
Format: Patent
Sprache:eng ; kor
Schlagworte:
ELECTRICITY
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Beschreibung
Zusammenfassung:Disclosed is a capacitor characterized by comprising: a lower electrode layer comprising an electrically conductive metal or a compound of the metal; a first dielectric film formed on the lower electrode layer and comprising ZrO2; a second dielectric film formed on the first dielectric film and comprising a dielectric material comprising a Ti-containing metal oxide; and an upper electrode layer formed on the second dielectric film.