A METHOD FOR SUPPLY AND DISCHARGE A BASE PLATE

PURPOSE: A method for supplying and discharging flat type targets is provided to improve the workability of post-processes by including a rotatable moving table. CONSTITUTION: A moving table(300) rotates at the same plane as a supplying line and a discharging line. Cassettes(160, 170, 180) receive a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SIN, GYE CHEOL, SHIN, DONG HYUK
Format: Patent
Sprache:eng ; kor
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PURPOSE: A method for supplying and discharging flat type targets is provided to improve the workability of post-processes by including a rotatable moving table. CONSTITUTION: A moving table(300) rotates at the same plane as a supplying line and a discharging line. Cassettes(160, 170, 180) receive and discharge target by being adjacent to the moving path of the moving table. An elevating part vertically elevates the moving table or the cassettes. The target is moved from the cassettes to the moving table. Surface treated target is moved from the discharging line to the moving table.