METHOD FOR INSPECTING EDGE OF PLATE

PURPOSE: A substrate edge inspecting method is provided to reduce a test time and entire inspection process by simultaneously moving a support table and vision part. CONSTITUTION: A substrate edge inspecting method is as follows a substrate is located on a support table(10) moving according to a fir...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	PARK, BYUNG GON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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