METHOD FOR INSPECTING EDGE OF PLATE

PURPOSE: A substrate edge inspecting method is provided to reduce a test time and entire inspection process by simultaneously moving a support table and vision part. CONSTITUTION: A substrate edge inspecting method is as follows a substrate is located on a support table(10) moving according to a fir...

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Bibliographische Detailangaben
1. Verfasser:	PARK, BYUNG GON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: A substrate edge inspecting method is provided to reduce a test time and entire inspection process by simultaneously moving a support table and vision part. CONSTITUTION: A substrate edge inspecting method is as follows a substrate is located on a support table(10) moving according to a first driving axis. A vision part(20) obtains first video information about a first edge pair of the loaded substrate. The support table rotates as a designated angle. The vision part moves according to a second driving axis. The second video obtains information about a second edge pair of the substrate. The support table turns as the designated angle in the opposite direction. The vision part and is arranged corresponding to the location of the second edge pair of the substrate. The vision part moves to the direction which faces to the support table.