AUTO-SEQUENCING MULTI-DIRECTIONAL INLINE PROCESSING APPARATUS

PURPOSE: An auto-sequencing multi-directional inline processing apparatus is provided to the flexibility of a main frame architecture while having the throughput of a linear system. CONSTITUTION: In an auto-sequencing multi-directional inline processing apparatus, a first loadlock chamber(110) is co...

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Bibliographische Detailangaben
Hauptverfasser:	KLEINKE STEVE, TOSHIMA MASATO, BLONIGAN WENDELL THOMAS, LAW KAM S, STEVENS CRAIG LYLE, BERKSTRESSER DAVID ERIC
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PURPOSE: An auto-sequencing multi-directional inline processing apparatus is provided to the flexibility of a main frame architecture while having the throughput of a linear system. CONSTITUTION: In an auto-sequencing multi-directional inline processing apparatus, a first loadlock chamber(110) is connected to the first side of a vacuum chamber(100). A vacuum valve(112) is arranged in the entrance of the loadlock chamber A second load lock chamber(115) is connected to the second side of the vacuum chamber. A loading chamber(112) is arranged in the entrance of the loadlock chamber A controller(140) opens the valve(102) to exchange the substrate.