TRAY FOR SUBSTRATE

PURPOSE: A substrate tray is provided to widen an available device forming region by reducing the size of a protrusion on the edge of the process surface of the substrate. CONSTITUTION: A plurality of substrate insertion holes(20) are formed in a main body. A movement preventing unit(11) is formed o...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, HYOUNG WON, KIM, YONG SOO, LEE, KYUNG HO, JUNG, SANG GON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PURPOSE: A substrate tray is provided to widen an available device forming region by reducing the size of a protrusion on the edge of the process surface of the substrate. CONSTITUTION: A plurality of substrate insertion holes(20) are formed in a main body. A movement preventing unit(11) is formed on one side of the substrate insertion hole. The substrate insertion hole includes a screw combination unit. A clamp(40) supports the substrate in the substrate insertion hole without the movement by rotatably combining with the other side of the substrate insertion hole without the movement preventing unit. The clamp include a clamp body and a combination ring. The combination ring is engaged with the screw combination unit.