DEPOSITION APPARATUS AND METHOD USING HIGH ELECTROSTATIC FIELD ASSISTED ULTRASONIC SPRAY SYSTEM

PURPOSE: Depositing device and method using ultrasonic spray are provided to control the dimension of aerosol through the frequency control of ultrasonic wave in a process of forming fine aerosol by applying ultrasonic wave to precursor solution. CONSTITUTION: A depositing device using ultrasonic sp...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	LEE, DONG YEUP, KIM, JUN HO, YOO, HYE SUN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: Depositing device and method using ultrasonic spray are provided to control the dimension of aerosol through the frequency control of ultrasonic wave in a process of forming fine aerosol by applying ultrasonic wave to precursor solution. CONSTITUTION: A depositing device using ultrasonic spray comprises an ultrasonic container(20), a precursor container(30), a path(40) and a hot plate(90). The ultrasonic container is filled with water and ultrasonic wave is transferred through water if the ultrasonic wave is applied. The precursor container makes contact with the ultrasonic container and contains precursor to generate aerosol by the transferred ultrasonic wave. The path moves the generated aerosol from the precursor container through gas. The hot plate is arranged to be adjacent to a substrate, on which the aerosol transferred through the path is deposited.