INTEGRATED VIBRATION CONTROL SYSTEM AND VIBRATION CONTROL METHOD USING THE SYSTEM

PURPOSE: An integrated vibration control system and a vibration control method using the same are provided to sensitively control the vibration of precision equipment. CONSTITUTION: An integrated vibration control system comprises a vibration control table(1), an anti-vibration mount(21), an MR damp...

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Bibliographische Detailangaben
Hauptverfasser: LEE, HONG KI, LEE, GYU SEOP
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: An integrated vibration control system and a vibration control method using the same are provided to sensitively control the vibration of precision equipment. CONSTITUTION: An integrated vibration control system comprises a vibration control table(1), an anti-vibration mount(21), an MR damper(22), a vibration control device(2), a vibration sensor(3), and a controller(4). The vibration control table mounts equipment. The anti-vibration mount comprises a bracket. The MR damper is comprised of a piston, a rod, and a coil wound with the piston. The vibration control device is comprised of an actuator which applies force on the vibration control table. The vibration sensor senses the vibration of the vibration control table. The controller controls the MR damper and the actuator.