BASEHOLDER AND METHOD OF MANUFACTURING CNT COATING FILM USING THE SAME

PURPOSE: An apparatus for fixing a coating deposition material is provided to prevent the deformation and movement of a coating deposition material. CONSTITUTION: An apparatus for fixing a coating deposition material includes a mainframe(40) installed along a process line, a vacuum plate(11) capable...

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Bibliographische Detailangaben
Hauptverfasser: KIM, MYEON SIK, HWANG, SEONG HONG, YIM, JEONG HYEOK
Format: Patent
Sprache:eng ; kor
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Beschreibung
Zusammenfassung:PURPOSE: An apparatus for fixing a coating deposition material is provided to prevent the deformation and movement of a coating deposition material. CONSTITUTION: An apparatus for fixing a coating deposition material includes a mainframe(40) installed along a process line, a vacuum plate(11) capable of adsorbing and fixing a coating deposition material mounted in the upper side in a flat state, a clamp(20) for pressurizing and fixing the upper side of the edge portion of the coating deposition material mounted on the vacuum plate.