SUPPORTING PLATE FOR NON-CONDUCTIVE SUBSTRATE AND SUPPORTING METHOD THEREOF

SUPPORTING PLATE FOR NON-CONDUCTIVE SUBSTRATE AND SUPPORTING METHOD THEREOF

PURPOSE: A supporting plate of a non-conductive substrate and a supporting method thereof are provided to fix a non-conductive substrate with static electricity to a supporting plate using static electricity, thereby reducing the size of a dead zone. CONSTITUTION: The first power source connector(31...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: LEE, KYUNG HO, JUNG, SANG GON
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A supporting plate of a non-conductive substrate and a supporting method thereof are provided to fix a non-conductive substrate with static electricity to a supporting plate using static electricity, thereby reducing the size of a dead zone. CONSTITUTION: The first power source connector(31) is placed on a part of the top of a lower electrode(30). The second power source connector(23) is located on the lower electrode. A static electricity induction electrode(21) is placed in the second power supply connector. The second power source connector supplies DC power to the static electricity induction electrode through a power line. A non-conductive substrate with static electricity is mounted on a mounting part(24).