A VACUUM DEPOSITION APPARATUS WITH CRUCIBLES INTERCHANGEABLE WITHOUT BEAKING VACUUM STATE IN A VACUUM CHAMBER

A VACUUM DEPOSITION APPARATUS WITH CRUCIBLES INTERCHANGEABLE WITHOUT BEAKING VACUUM STATE IN A VACUUM CHAMBER

PURPOSE: A vacuum depositing apparatus which replaces a crucible without breaking a vacuum state in a vacuum chamber is provided to reduce process time by not requiring the re-vacuuminzation process of the vacuum chamber. CONSTITUTION: A deposition process is performed in a first vacuum chamber(100)...

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Bibliographische Detailangaben
Hauptverfasser: KIM, SEONG MOON, CHI, DAE JOON, JEONG, KWANG HO, JUNG, EUN SANG
Format: Patent
Sprache:eng ; kor
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A vacuum depositing apparatus which replaces a crucible without breaking a vacuum state in a vacuum chamber is provided to reduce process time by not requiring the re-vacuuminzation process of the vacuum chamber. CONSTITUTION: A deposition process is performed in a first vacuum chamber(100). A second vacuum chamber(200) is bonded with the first vacuum chamber. A door unit(180) is installed in a junction part between the first and second vacuum chambers. A crucible elevator(130) vertically lifts or drops a crucible. A crucible arrangement unit(210) is mounted on the second vacuum chamber.