BOAT

PURPOSE: A boat is provided to increase the processing amount of the substrate by shortening the time for loading and unloading the substrate by floating the substrate by supplying the gas from the boat. CONSTITUTION: A chamber(30) offers the board processing space for a substrate(10). A heater(40)...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser:	JANG, HEE SUP
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PURPOSE: A boat is provided to increase the processing amount of the substrate by shortening the time for loading and unloading the substrate by floating the substrate by supplying the gas from the boat. CONSTITUTION: A chamber(30) offers the board processing space for a substrate(10). A heater(40) heats the substrate. The lower part of the chamber is installed with a susceptor(32) and a manifold(34). A boat(100) comprises the first main body part and the second main body part. The first main body part comprises lower part and upper frames(210a, 220a), a perpendicular frame(230a), and a support rod.