POLYSILAZANE COMPOSITIONS COMPRISING AMINOSILANE
PURPOSE: A polysilazane composition is provided to reduce the volume contraction of silicon dioxide and to form a silicon oxide film suitable for electric components with excellent film texture. CONSTITUTION: A polysilazane composition for forming a film comprises a polysilazane solution and aminosi...
Gespeichert in:
Hauptverfasser: | , , , , , , , , , |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE: A polysilazane composition is provided to reduce the volume contraction of silicon dioxide and to form a silicon oxide film suitable for electric components with excellent film texture. CONSTITUTION: A polysilazane composition for forming a film comprises a polysilazane solution and aminosilane. A method for preparing the polysilazane composition comprises a step of mixing a solution including a skeleton represented by chemical formula 1 in which polysilazane with an average molecular weight of 3,000-10,000 is dissolved, with aminosilane of chemical formula 2: H_mSi(NR^1R^2)_(4-m) or chemical formula 3: H_nSi(ONR^3R^4)_(4-n) in a weight ratio of 10 : 0.1~2. |
---|