POLYSILAZANE COMPOSITIONS COMPRISING AMINOSILANE

PURPOSE: A polysilazane composition is provided to reduce the volume contraction of silicon dioxide and to form a silicon oxide film suitable for electric components with excellent film texture. CONSTITUTION: A polysilazane composition for forming a film comprises a polysilazane solution and aminosi...

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Hauptverfasser: CHO, YIK HAENG, OH, JEONG MI, LIM, MIN HYUK, BYUN, TAE SEOK, KWONE, YONG HEE, KIM, JIN DONG, PARK, JEONG HYEON, SON, SEUNG, KIM, MYONG WOON, JEON, SANG YONG
Format: Patent
Sprache:eng ; kor
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Zusammenfassung:PURPOSE: A polysilazane composition is provided to reduce the volume contraction of silicon dioxide and to form a silicon oxide film suitable for electric components with excellent film texture. CONSTITUTION: A polysilazane composition for forming a film comprises a polysilazane solution and aminosilane. A method for preparing the polysilazane composition comprises a step of mixing a solution including a skeleton represented by chemical formula 1 in which polysilazane with an average molecular weight of 3,000-10,000 is dissolved, with aminosilane of chemical formula 2: H_mSi(NR^1R^2)_(4-m) or chemical formula 3: H_nSi(ONR^3R^4)_(4-n) in a weight ratio of 10 : 0.1~2.