POLYSILAZANE TREATING SOLVENT AND METHOD FOR TREATING POLYSILAZANE USING THE SAME

PURPOSE: A polysilazane treatment solvent is provided to enable use in edge cutting and backside rinsing due to high polysilazane solubility and to reduce the amount of gas generated from a waste liquid tank. CONSTITUTION: A polysilazane treatment solvent is a mixture of two or more of the following...

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Bibliographische Detailangaben
Hauptverfasser:	CHO, YIK HAENG, BYUN, TAE SEOK, KWONE, YONG HEE, KIM, JIN DONG, PARK, JEONG HYEON, SON, SEUNG, KIM, MYONG WOON, JEON, SANG YONG
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ADHESIVES ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES BASIC ELECTRIC ELEMENTS CANDLES CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS DETERGENT COMPOSITIONS DETERGENTS DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FATTY ACIDS THEREFROM MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS PAINTS POLISHES RECOVERY OF GLYCEROL RESIN SOAPS SEMICONDUCTOR DEVICES SOAP OR SOAP-MAKING THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF SINGLE SUBSTANCES AS DETERGENTS
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Beschreibung
Zusammenfassung:	PURPOSE: A polysilazane treatment solvent is provided to enable use in edge cutting and backside rinsing due to high polysilazane solubility and to reduce the amount of gas generated from a waste liquid tank. CONSTITUTION: A polysilazane treatment solvent is a mixture of two or more of the following: toluene, heptanes, and etherified. The etherified material is selected from diethyl ether, ethyl phenyl ether, diisopropylether, diisopentylether, or their mixture. A method for treating polysilazane comprises the steps of: applying the polysilazane treatment solvent to a substrate(110); and removing polysilazane by spraying the polysilazane treatment solvent to the polysilazane(130) of filtrate(140) or protrusion.