THE PROCESS IMPROVEMENT TO THE FAST GROWTH RATE
PURPOSE: A growth rate improving method is provided to improve productivity by improving temperature gradients of a solid-liquid interface and rapidly solidifying a melt solution. CONSTITUTION: A solid-liquid interface is located in a location having temperature gradients inside a heating element(10...
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Format: | Patent |
Sprache: | eng ; kor |
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Zusammenfassung: | PURPOSE: A growth rate improving method is provided to improve productivity by improving temperature gradients of a solid-liquid interface and rapidly solidifying a melt solution. CONSTITUTION: A solid-liquid interface is located in a location having temperature gradients inside a heating element(10). A melt solution is rapidly coagulated by increasing the temperature gradients after controlling the location(11) of the solid-liquid interface and raising it higher than a part where the temperature of the heating element is highest. The productivity of a silicon single crystal is improved by improving a crystallization speed. |
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