METHOD FOR TREATING WASTED ORGANIC SOLVENT CONTAINING A CROSSLINKABLE PHOTORESIST COMPONENT

PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a p...

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Bibliographische Detailangaben
Hauptverfasser:	JEONG, JIN BAE, MUN, JAE WOONG, JEONG, HYUN CHEOL, LEE, MYUNG HO, KANG, DO SOON
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR METALLURGY ORGANIC CHEMISTRY ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	PURPOSE: A processing method of a waste organic solvent is provided to minimize the processing trouble by the cross-linking polymerization of a cross-linking photoresist component through the heat. CONSTITUTION: A processing method of a waste organic solvent comprises the following steps: adding a polymerization inhibitor to the waste organic solvent including a cross-linking photoresist component for controlling the cross-linking polymerization; and collecting an organic solvent from the waste organic solvent mixed with the polymerization inhibitor.