SYSTEM AND METHOD FOR MEASURING THICKNESS OF FILM

PURPOSE: A film thickness measurement system and a method for measuring the thickness of a film are provided to enable a user to obtain film thickness measuring data wherein noise is removed. CONSTITUTION: A film thickness measurement system comprises a flash detector and a noise removal device(90)....

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Bibliographische Detailangaben
Hauptverfasser:	LEE, CHOONG HUN, ZO, MOON SHIN, KIM, SUNG GON, SUR, JUNG CHUL, CHOI, JONG WOAN
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	CALCULATING COMPUTING COUNTING ELECTRIC DIGITAL DATA PROCESSING INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PURPOSE: A film thickness measurement system and a method for measuring the thickness of a film are provided to enable a user to obtain film thickness measuring data wherein noise is removed. CONSTITUTION: A film thickness measurement system comprises a flash detector and a noise removal device(90). The flash detector detects the amount of a light source emitted to a target film to be measured. The noise removal device produces and outputs signals wherein a first reference signal and a second reference signal are balanced. The first reference signal means upward level signals which are increased to exceed a specified level in respect to pulse signals. The first reference signal means upward level signals which are increased to exceed a specified level which is lower than the first reference signal.