DIE BONDER AND DIE BONDING METHOD USING THE SAME
PURPOSE: A die bonder and a die bonding method using the same are provided to reduce the time required to perform die bonding work by immediately separating and a eliminating a film from a wafer. CONSTITUTION: A fixing unit(100) adsorbs and fixes a wafer. A film eliminating unit(300) eliminates film...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng ; kor |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PURPOSE: A die bonder and a die bonding method using the same are provided to reduce the time required to perform die bonding work by immediately separating and a eliminating a film from a wafer. CONSTITUTION: A fixing unit(100) adsorbs and fixes a wafer. A film eliminating unit(300) eliminates film from the wafer. A substrate supplier(400) supplies a substrate. An adhesive coating unit(500) coats an adhesive on a die or the substrate. A bonding unit(600) bonds the die on a fixed location of the substrate. |
---|