CONFINING MAGNETS IN SPUTTERING CHAMBER

PURPOSE: A confining magnets in sputtering chamber is provided to coat a side of a via better by inclining two targets in an opposing angle. CONSTITUTION: A chamber(30) comprises at least one product support region(42) for accepting a product. The chamber can be sealed in order to create a low-press...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MULLAPUDI RAVI, NINAN BIJU
Format:	Patent
Sprache:	eng ; kor
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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