QUANTIFICATION METHOD OF BIOCHEMICAL SUBSTANCES USING ION SCATTERING SPECTROSCOPY AND SPECIFIC-BINDING EFFICIENCY QUANTIFICATION METHOD OF BIOCHEMICAL SUBSTANCES USING ION SCATTERING SPECTROSCOPY

PURPOSE: A method for measuring the area density of analyte bound on a surface of a substrate is provided to manufacture a biochip which is able to control quality and enhance analysis accuracy and reliability. CONSTITUTION: An analyte containing biochemical material bound to the surface of a substrate is quantitatively measured through ISS(ion scattering spectroscopy). The ISS is MEIS(medium energy ion scattering spectroscopy). The quantitation comprises: a step of injecting a hydrogen ion(H^+) to a specific area of the substrate surface to detect energy and the amount of emitted hydrogen ion; a step of calculating the area density(atoms/area) of a first atom contained in the analyte; and a step of calculating the area density(number/area) of the analyte from the area density of the first atom. The analyte exists in a layer in a certain area of the substrate surface.