PEELING APPARATUS, ORGANIC FILM FORMING APPARATUS HAVING THE PEELING APPARATUS, AND PEELING METHOD

PEELING APPARATUS, ORGANIC FILM FORMING APPARATUS HAVING THE PEELING APPARATUS, AND PEELING METHOD

PURPOSE: A peeling apparatus and an organic film forming apparatus having a peeling apparatus and a peeling method are provided to improve the efficiency of stripping by using stripping units for a mask and substrate. CONSTITUTION: A peeling apparatus(400A) for a mask comprises a first plate, a hold...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HARIMA YOSHIYUKI, ONO YUJI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PURPOSE: A peeling apparatus and an organic film forming apparatus having a peeling apparatus and a peeling method are provided to improve the efficiency of stripping by using stripping units for a mask and substrate. CONSTITUTION: A peeling apparatus(400A) for a mask comprises a first plate, a holding member, and a plurality of first pins. The first plate is arranged in the opposite side of the holding stage. A pressing member presses a first plate in a first timing. A plurality of first pins are fixed to the first plate. The peeling apparatus(400B) for the substrate comprises a second plate, the pressing member, and a plurality of second pins. The second plate is adjacent to the first plate. The pressing member presses the second plate in a second timing. A plurality of second pins are fixed to the second plate.