JIG FOR SUBSTRATE-TREATING APPARATUS AND MAINTENANCE METHOD USING THE SAME

PURPOSE: A jig for a substrate-treating apparatus and a maintenance method using the same are provided to maintain the interval of a gas distributing plate and a substrate uniform by easily placing the center of gas distributing plate to a diffuser cover. CONSTITUTION: A first jig(110) includes a pl...

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Bibliographische Detailangaben

Hauptverfasser:	KANG, HO CHUL, HUR, SUNG MIN
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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