METHOD AND EQUIPMENT FOR TREATING SUBSTRATE

PURPOSE: A method and equipment for treating substrate is provided to shorter the transfer time for carrying the holding vessel to the load port. CONSTITUTION: The cassette openers(220) open and close the door of cassette. The load port(420) locates at the cassette openers. The cassette logistics eq...

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Bibliographische Detailangaben
Hauptverfasser:	YOO, SEUNG WOO, NOH, HWAN IK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS SEMICONDUCTOR DEVICES TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ARTCOLLECTIONS [XRACs] AND DIGESTS
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Beschreibung
Zusammenfassung:	PURPOSE: A method and equipment for treating substrate is provided to shorter the transfer time for carrying the holding vessel to the load port. CONSTITUTION: The cassette openers(220) open and close the door of cassette. The load port(420) locates at the cassette openers. The cassette logistics equipment leaves cassette or load ports. The carriage units(410,430) send back cassette between the cassette openers and the load ports.