APPARATUS FOR TREATING SUBSTRATE HAVING SUBSTRATE SUPPORT FRAME

PURPOSE: A substrate processing device is provided to improve quality of a thin film on a substrate by uniformly transmitting the heat from a substrate receiving unit by increasing a contact area between the substrate and the substrate receiving unit. CONSTITUTION: A substrate processing device incl...

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Bibliographische Detailangaben
Hauptverfasser:	PARK, SUK JU, HWANG, SEONG RYONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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