STACKED LOAD LOCK CHAMBER AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

PURPOSE: A stacked load lock chamber and a substrate processing apparatus including the same are provided to protect a substrate while loading and unloading of the substrate from the particle in air. CONSTITUTION: A stack load lock chamber(2) comprises a first and a second load lock chambers(100,150) and a first and second slit-valve transfer(101,151). The first and second load lock chambers are successively laminated inside a stack load lock chamber. The first slit - valve transfer opens and closes a first opening of the first load lock chamber. A second slit - valve transfer opens and closes the second aperture of the second rod lock chamber. The stack load lock chamber more includes a first and second arms and an actuator.