CU(II) COMPLEX, METHOD FOR MANUFACTURING THE SAME, METHOD FOR MANUFACTURING COPPER THIN FILM USING THE SAME AND SEMICONDUCTOR SUBSTRATE MANUFACTURED BY USING THE SAME

PURPOSE: A bivalent copper complex compound and a method for preparing the copper thin film using the same are provided to ensure excellent deposition characteristic and easily produce the copper thin film having excellent step coverage on the substrate. CONSTITUTION: A bivalent copper complex compo...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KIM, SEOK SEON, SIM, JAE YONG, YANG, IL DOO, CHA, DU HWAN, KIM, SU BONG
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAININGELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN,SULFUR, SELENIUM OR TELLURIUM BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY ORGANIC CHEMISTRY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!