SUPPORTING MEMBER OF MIRROR AND EXPOSURE DEVICE HAVING THE SAME
PURPOSE: A supporting member of a mirror and an exposure device having the same are provided to form an exposure pattern of high definition on a substrate by moving a mirror stably. CONSTITUTION: In a device, a mirror supporter for an exposure apparatus is installed in the exposure apparatus, and it...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PURPOSE: A supporting member of a mirror and an exposure device having the same are provided to form an exposure pattern of high definition on a substrate by moving a mirror stably. CONSTITUTION: In a device, a mirror supporter for an exposure apparatus is installed in the exposure apparatus, and it supports a mirror reflecting light. The mirror supporter includes a plurality of prepregs(P) and a core consisting of a honeycomb structure or the foam structure. The prepreg surrounds the core in order to arrange it therein. The prepreg has a laminated structure and includes the first prepreg and the second prepreg. Both ends of the first prepreg are contacted with each other to surround the core. Both ends of the second prepreg are contacted with each other to surround the core. |
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