SPACER ARRANGING METHOD

A technique of arranging spacers not causing a streak. On a column of a light-shielding zone (11) of a coating subject (10), ejection positions are set and stored as temporary ejection positions in a memory device (9). A random number generating function is allowed to generate a positive or negative...

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Bibliographische Detailangaben
Hauptverfasser: YUYAMA JUNPEI, NAMEKAWA TAKUMI, SUWA HIDENORI, SUNAGA YOSHIO, HANE KOUJI, MATSUDAI MASASUKE
Format: Patent
Sprache:eng
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Zusammenfassung:A technique of arranging spacers not causing a streak. On a column of a light-shielding zone (11) of a coating subject (10), ejection positions are set and stored as temporary ejection positions in a memory device (9). A random number generating function is allowed to generate a positive or negative random real number. Each time a positive or negative random number is generated, the random number is associated with the temporary ejection position in a one-to-one correspondence relation and stored as a random number coefficient R. When the coordinates of the temporary ejection position is denoted by (X, Y), the value of the coordinate X is added to the product of the stored random number coefficient R and the distance L between adjacent temporary ejection positions in the same column, and the thus corrected ejection position (X+LxR, Y) is determined and stored. If a spacer group (15) is located at the corrected ejection positions, the amount of movement caused by the error is absorbed by the random number coefficient R and no streaks appear.