JIG FOR DOCKING A SYSTEM FOR PROCEEDING A SUBSTRATE

PURPOSE: A jig for docking a system for processing a substrate is provided to prevent the damage of the substrate processing arrangement by using the buffer member. CONSTITUTION: The main body(110) comprises the first buffer member(113) alleviating the impact about the substrate processing arrangeme...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LEE, MUN HAK, JOUNG, KYU WON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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