JIG FOR DOCKING A SYSTEM FOR PROCEEDING A SUBSTRATE

PURPOSE: A jig for docking a system for processing a substrate is provided to prevent the damage of the substrate processing arrangement by using the buffer member. CONSTITUTION: The main body(110) comprises the first buffer member(113) alleviating the impact about the substrate processing arrangeme...

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Bibliographische Detailangaben
Hauptverfasser:	LEE, MUN HAK, JOUNG, KYU WON
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PURPOSE: A jig for docking a system for processing a substrate is provided to prevent the damage of the substrate processing arrangement by using the buffer member. CONSTITUTION: The main body(110) comprises the first buffer member(113) alleviating the impact about the substrate processing arrangement. The grating portion(120) has the second buffer member(123) alleviating the impact about grating. The driving unit(130) comprises rollers for transferring the substrate processing arrangement. The supporting part supports the lower part of the substrate processing arrangement while being connected to the driving unit. The facility part(140) comprises the third buffer member alleviating the impact about the substrate processing arrangement. The shaft is connected across the elongate member to roller.