POLISHING LIQUID FOR METAL AND METHOD OF POLISHING FILM TO BE POLISHED

A polishing liquid for metals which comprises: a metal oxide solubilizer, a metal corrosion inhibitor, a polyacrylic acid polymer, a metal-oxidizing agent, and water. The metal-oxidizing agent is hydrogen peroxide, and the content of hydrogen peroxide is 12-30 mass% based on the polishing liquid for...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	TOBITA AYAKO, NARITA TAKENORI, NOBE SHIGERU, ANZAI SOU
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL DYES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25 NATURAL RESINS NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE PAINTS POLISHES SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A polishing liquid for metals which comprises: a metal oxide solubilizer, a metal corrosion inhibitor, a polyacrylic acid polymer, a metal-oxidizing agent, and water. The metal-oxidizing agent is hydrogen peroxide, and the content of hydrogen peroxide is 12-30 mass% based on the polishing liquid for metals. With the polishing liquid for metals, a surface can be polished so as to realize excellent flatness while maintaining a satisfactory polishing speed. Also provided is a method of polishing a film to be polished which comprises using the polishing liquid.