APPARATUS AND METHOD FOR FABRICATING ORGANIC LIGHT EMITTING DIODE DISPLAY DEVICE

PURPOSE: An apparatus and a method for manufacturing an organic electroluminescent display device are provided to prevent a gap between a mask and a substrate in a film deposition process by using a substrate-mask sticking unit. CONSTITUTION: A mask(120) is arranged inside a chamber(110). The mask h...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	KOBAYASHI IKUNORI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PURPOSE: An apparatus and a method for manufacturing an organic electroluminescent display device are provided to prevent a gap between a mask and a substrate in a film deposition process by using a substrate-mask sticking unit. CONSTITUTION: A mask(120) is arranged inside a chamber(110). The mask has an opening(125) of a fixed pattern. A deposition material supply source(130) is arranged under the mask. The deposition material supply source supplies a deposition material to a mask side through the opening of the mask. A substrate-mask sticking unit(170a) includes a flexible plate and a transfer device. The flexible plate pressurizes a top surface of the substrate into the mask side. The flexible plate is transformed according to deflection of the substrate. The transfer device transfers the flexible plate into the top surface of the substrate.