MASK FRAME ASSEMBLY

A mask frame assembly is provided to prevent the drooping of a mask by inducing the thermal expansion of a frame and to perform the precise patterning by the evaporation deposition process using a mask. A mask frame assembly(10) comprises a frame(100) having an aperture(110); a thermal expansion gui...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SEO, JEONG MIN, KIM, YANG SOO, PARK, YOUNG JONG, HUR, ROG
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	A mask frame assembly is provided to prevent the drooping of a mask by inducing the thermal expansion of a frame and to perform the precise patterning by the evaporation deposition process using a mask. A mask frame assembly(10) comprises a frame(100) having an aperture(110); a thermal expansion guide device(300) which is installed at the frame and induces the thermal expansion of the frame; and a mask(200) which is connected to the frame so as to be supported by the frame and is provided with a patterning part(220) at the location corresponding to the aperture. The frame is made of a metal material. The thermal expansion guide device is connected electrically with the frame so as to induce the thermal expansion of the frame by using the Ohm's law.