METHOD FOR MAINTAINING STATISTICAL PROCESS USED SEMICONDUCTOR MANUFACTURE EQUIPMENT CONTROL SYSTEM

METHOD FOR MAINTAINING STATISTICAL PROCESS USED SEMICONDUCTOR MANUFACTURE EQUIPMENT CONTROL SYSTEM

A method for maintaining a statistical process used for a semiconductor manufacture equipment control system are provided to increase the reliability of a process management and maximize it by update a management limit time through QB statistical volume in real time. In a method for maintaining a st...

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Hauptverfasser: LEE, HO YOUNG, CHOI, SANG WOOK, KIM, HYUNG SUN, TONG, SEUNG HOON, LEE, HYUN CHEOL
Format: Patent
Sprache:eng ; kor
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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creator LEE, HO YOUNG
CHOI, SANG WOOK
KIM, HYUNG SUN
TONG, SEUNG HOON
LEE, HYUN CHEOL
description A method for maintaining a statistical process used for a semiconductor manufacture equipment control system are provided to increase the reliability of a process management and maximize it by update a management limit time through QB statistical volume in real time. In a method for maintaining a statistical process used for a semiconductor manufacture equipment control system, measurement data corresponded to the property of a wafer from more than one measurement apparatus are collected(S10). The general statistics amount corresponding to a mean value and a distribution value of measurement data is calculated(S20). The distribution in a group is corresponded to the measurement data detected from a plurality of wafers. Measurement data are detected from a target wafer based on the several cassettes in which a plurality of wafers is mounted.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title METHOD FOR MAINTAINING STATISTICAL PROCESS USED SEMICONDUCTOR MANUFACTURE EQUIPMENT CONTROL SYSTEM
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