METHOD FOR CALIBRATING THE X-Y POSITIONING OF A POSITIONING TOOL, AND APPARATUS WITH SUCH A POSITIONING TOOL

The invention relates to a method for calibrating the x-y positioning of a positioning tool (1), a method for placing a component (3) on a substrate (4), an apparatus with a positioning tool (1) and with an image detection system (2), and a calibration apparatus (100) for calibrating the x-y positio...

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Bibliographische Detailangaben
Hauptverfasser: MARTE ANDREAS, SCHUSTER JOHANNES, ERNST URBAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to a method for calibrating the x-y positioning of a positioning tool (1), a method for placing a component (3) on a substrate (4), an apparatus with a positioning tool (1) and with an image detection system (2), and a calibration apparatus (100) for calibrating the x-y positioning of a positioning tool (1) based on an image detection system (2). The x-y positioning of the positioning tool (1) is calibrated with respect to the coordinates of the image detection system (2) by means of, in a calibration mode, (i) positioning the positioning tool (1) on a raster point (24), (ii) detecting the tool coordinates of the raster point (24), (iii) detecting a reference mark (14) arranged in a defined position with respect to the positioning tool (1) using the image detection system (2), (iv) determining the coordinates of the reference mark (14) with respect to the image detection system (2), (v) repeating the steps (i)-(iv) for the same or other raster points (24) and (vi) correlating and/or aligning the tool coordinates and the coordinates in the image detection system (2) of the respective raster points (24). ® KIPO & WIPO 2009