INFRARED SENSOR AND MANUFACTURING METHOD THEREOF

An infrared sensor and a manufacturing method thereof are provided to prevent a problem generated in removing a sacrificial layer from a heat-sensitive device in advance by making reaction of a heat-sensitive resistor rapid according to temperature of a substrate. A first device(1a) is formed on a s...

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Bibliographische Detailangaben
1. Verfasser: KURASHINA SEIJI
Format: Patent
Sprache:eng
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